In:
Journal of the Korean institute of surface engineering, The Korean Institute of Surface Engineering, Vol. 43, No. 6 ( 2010-12-31), p. 309-314
Type of Medium:
Online Resource
ISSN:
1225-8024
Uniform Title:
반도체 표면처리공정용 대면적 히터 플레이트의 열전달 특성에 관한 연구
DOI:
10.5695/JKISE.2010.43.6.309
Language:
English
Publisher:
The Korean Institute of Surface Engineering
Publication Date:
2010
detail.hit.zdb_id:
2842418-9