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STUDY OF VALENCE-BAND PROPERTIES IN a-Si1-xCx:H BY UV PHOTO-ELECTRON SPECTROSOPY

Zhang Fang-qing ; Xu Xi-xiang ; Chen Guang-hua ; [et al.]

Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences ; 1986

In: Acta Physica Sinica Vol. 35, No. 9 ( 1986), p. 1253-

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In: Acta Physica Sinica, Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, Vol. 35, No. 9 ( 1986), p. 1253-

Abstract: We studied the valence-band (VB) spectra of hydfogenated amorphous silieon-earbon alloy film (a-Si C:H:) by means of UPS technique and analysed the influence of doping and surface oxidation on VB spectra. Accompanied with XPS and AES analysis, we preliminarily investigated the distribution and bonding property of valence electrons in the alloy films.

Type of Medium: Online Resource

ISSN: 1000-3290 , 1000-3290

URL: Journal

URL: Article

DOI: 10.7498/aps

DOI: 10.7498/aps.35.1253

Language: Unknown

Publisher: Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences

Publication Date: 1986