In:
Acta Physica Sinica, Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, Vol. 40, No. 4 ( 1991), p. 659-
Abstract:
In this paper, the effects of the incidence angle of the ion-bombardment on the puttering parameters ire investigated by using Monte Carlo simulation based on the binary collision approximation. The dependence of sputtering yields, energy and angular distribution as well as threshold energy of sputtered particles on incidence angle are discussed. The results of calculation are compared with data given by semi-empirical formula and measurments.
Type of Medium:
Online Resource
ISSN:
1000-3290
,
1000-3290
Language:
Unknown
Publisher:
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Publication Date:
1991
