In:
Acta Physica Sinica, Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, Vol. 62, No. 1 ( 2013), p. 017802-
Abstract:
The hydrogenous diamond-like carbon (DLC) films deposited on Si substrates using pulsed glow discharge method are investigated using Raman spectroscopy and X-ray photoelectron spectroscopy method. The UV Raman spectrum for excitation wavelength is 325 nm. UV Raman is particularly useful for hydrogenous DLC, as it gives clear measurements in the D and G peak spectral region even for highly hydrogenated samples, for which the visible Raman spectra are overshadowed by photoluminescence. The sp3 bonding of hydrogenous DLC film can be effectively studied by X-ray photoelectron spectroscopy method, and the data from the X-ray photoelectron spectroscopy method are compared with Raman results. It is found that G peak shows a shift to ward a higher wave under UV excitation. For the G peak, I(D)/I(G), G-FWHM and sp3, there exists a relationship among them.
Type of Medium:
Online Resource
ISSN:
1000-3290
,
1000-3290
DOI:
10.7498/aps.62.017802
Language:
Unknown
Publisher:
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Publication Date:
2013