Format:
Online-Ressource
,
online resource.
ISSN:
1432-1858
,
1432-1858
In:
volume:11
In:
number:8-10
In:
day:3
In:
month:8
In:
year:2005
In:
pages:1071-1080
In:
date:8.2005
In:
Microsystem technologies, Berlin ; Heidelberg : Springer, 1994-, 11, Heft 8-10 (3.8.2005), 1071-1080, 8.2005, 1432-1858
Language:
English
DOI:
10.1007/s00542-005-0521-9
URN:
urn:nbn:de:101:1-2019092220002652194996
URL:
https://doi.org/10.1007/s00542-005-0521-9
URL:
https://nbn-resolving.org/urn:nbn:de:101:1-2019092220002652194996
URL:
https://d-nb.info/1195416040/34
URL:
https://doi.org/10.1007/s00542-005-0521-9