Format:
Online-Ressource
Content:
Precise and reproducible surface nanopatterning is the key for a successful ordered growth of GaN nanocolumns. In this work, we point out the main technological issues related to the patterning process, mainly surface roughness and cleaning, and mask adhesion to the substrate. We found that each of these factors, process-related, has a dramatic impact on the subsequent selective growth of the columns inside the patterned holes. We compare the performance of e-beam lithography, colloidal lithography, and focused ion beam in the fabrication of hole-patterned masks for ordered columnar growth. These results are applicable to the ordered growth of nanocolumns of different materials.
In:
In: Nanoscale Research Letters, Volume 6, Issue 1
In:
Datenlieferant: Renate - Repositorium für Naturwissenschaften und Technik (TIB Hannover)
Language:
English
URL:
https://doi.org/10.34657/1453
