Format:
XV, 107 S.
,
Ill., graph. Darst.
,
30 cm
Note:
Ilemnau, techn. Univ., Diss., 2003
Additional Edition:
Online-Ausg. Chen, Chao-Jung, 1960- Development of a traceable atomic force microscope with interferometer and compensation flexure stage
Language:
English
Subjects:
Engineering
Keywords:
Rasterkraftmikroskop
;
Kalibrieren
;
Laserinterferometer
;
Hochschulschrift