Format:
1 online resource (164 pages)
ISBN:
9783832593612
Series Statement:
Research at NaMLab Ser. v.3
Content:
Intro -- 1 Introduction -- 1.1 Motivation -- 1.2 Structure of this work -- 2 Fundamentals of materials and electrical properties -- 2.1 Calcium titanate -- 2.1.1 Structure -- 2.1.2 Optical properties and band gap -- 2.1.3 Permittivity of CaTiO3 -- 2.1.4 Current applications for CaTiO3 -- 2.2 Metals and conducting metal composites for applicable high temperature processes -- 2.3 Non-linearity of dielectric permittivity -- 2.4 Leakage current mechanisms -- 2.4.1 Schottky emission -- 2.4.2 Tunneling -- 2.4.3 Poole-Frenkel effect -- 2.4.4 Trap-assisted tunneling -- 2.5 Dielectric relaxation -- 2.6 Amorphous versus crystalline dielectric layers -- 3 Sample Preparation and Methods -- 3.1 Sample Preparation of metal-insulator-metal capacitors -- 3.1.1 Sputtering of electrodes and high-k dielectrics -- 3.1.2 Standard parameters for metal deposition -- 3.1.3 Parameters for dielectric deposition -- 3.1.4 Structuring of top electrodes -- 3.2 Physical characterization -- 3.3 Electrical characterization -- 3.3.1 Current voltage measurements -- 3.3.2 Leakage current measurements at different temperatures -- 3.3.3 Capacitance voltage measurements -- 3.3.4 Relaxation measurements -- 4 Temperature stable high work function electrodes -- 4.1 Sputter deposition of electrodes -- 4.1.1 Titanium nitride layers -- 4.1.2 Ruthenium and Ruthenium dioxide layers -- 4.1.3 Platinum electrodes -- 4.1.4 Platinum on Titanium nitride -- 4.2 CVD deposition of carbon electrodes -- 4.3 Conclusion -- 5 Physical investigation of calcium titanate layers -- 5.1 Experiments on optical properties and density of CaTiO3 layers -- 5.1.1 Refractive index and extinction coefficient of CaTiO3 -- 5.1.2 Band gap determination with low energy electron energy loss spectroscopy -- 5.1.3 Density approximation with X-Ray reflectance -- 5.2 X-ray photoelectron spectroscopy of CaTiO3 layers.
Note:
Description based on publisher supplied metadata and other sources
Additional Edition:
9783832537241
Additional Edition:
Erscheint auch als Druck-Ausgabe 9783832537241
Language:
English
