ISBN:
9781510883864
In:
International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components (8. : 2014 : Wien), Smart Systems Integration 2014, Red Hook, NY : Curran Associates, Inc., 2019, (2019), Seite 263-270, 9781510883864
In:
year:2019
In:
pages:263-270
Language:
English