UID:
almafu_9959327217102883
Format:
1 online resource (xii, 500 pages) :
,
illustrations
ISBN:
9783527613007
,
3527613005
,
9783527613014
,
3527613013
,
0470035226
,
9780470035221
Content:
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
Note:
Microsystern Technology; Content; 1 General Introduction to Microstructure Technology; 2 The Parallels to Microelectronics; 3 The Physical and Chemical Basics in Microtechnology; 4 Basic Technologies in MEMS; 5 Lithography; 6 Silicon Microsystem Technology; 7 The LIGA Process; 8 Alternative Processes of Microstructuring; 9 Packaging and Interconnecting Techniques (PIT); 10 System Technology; Literatur.
Additional Edition:
Print version: Menz, W. (Wolfgang). Microsystem technology. Weinheim ; New York : Wiley-VCH, ©2001 ISBN 3527296344
Additional Edition:
ISBN 9783527296347
Language:
English
Keywords:
Electronic books.
;
Electronic books.
;
Electronic books.
DOI:
10.1002/9783527613007
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007
