UID:
almafu_9959328116802883
Format:
1 online resource (xx, 303 pages) :
,
illustrations
ISBN:
9783527622139
,
3527622136
,
9783527622566
,
352762256X
,
9783527675036
,
3527675035
,
9783527314942
,
3527314946
Series Statement:
Advanced micro & nanosystems ; v. 6
Note:
"Testing of materials and devices"--Cover.
,
Machine derived contents note: Preface. -- Foreword. -- List of Contributors. -- Overview. -- 1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization (Toshiyuki Tsuchiya). -- 2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating?Substrate Systems (Mototsugu Sakai) -- 3 Thin-fi lm Characterization Using the Bulge Test (Oliver Paul, Joao Gaspar). -- 4 Uniaxial Tensile Test for MEMS Materials (Takahiro Namazu). -- 5 On-chip Testing of MEMS (Harold Kahn). -- 6 Reliability of a Capacitive Pressure Sensor (Fumihiko Sato, Hideaki Watanabe, Sho Sasaki). -- 7 Inertial Sensors (Osamu Torayashiki, Kenji Komaki). -- 8 Inertial Sensors (Noriyuki Yasuik). -- 9 Reliability of MEMS Variable Optical Attenuator (Hiroshi Toshiyoshi, Keiji Isamoto, Changho Chong). -- 10 Eco Scan MEMS Resonant Mirror (Yuzuru Ueda, Akira Yamazaki). -- Index.
Additional Edition:
Print version: Reliability of MEMS. Weinheim : Wiley-VCH, ©2008 ISBN 9783527314942
Additional Edition:
ISBN 3527314946
Language:
English
Keywords:
Electronic books.
;
Electronic books.
;
Electronic books.
DOI:
10.1002/9783527622139
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9783527622139
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9783527622139
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9783527622139
