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UID:

almafu_BV004589729

Format: XIII, 410 S. : , Ill., graph. Darst.

ISBN: 3-540-53428-8 , 0-387-53428-8 , 978-3-662-31104-2

Series Statement: Topics in Applied Physics 64

In: Sputtering by particle bombardment.

Additional Edition: Erscheint auch als Online-Ausgabe ISBN 978-3-540-46881-3

Language: English

Subjects: Physics

RVK:

UP 9350

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