UID:
almahu_9949199422202882
Umfang:
XX, 622 p.
,
online resource.
Ausgabe:
1st ed. 1992.
ISBN:
9781475767759
Serie:
Microdevices, Physics and Fabrication Technologies
Inhalt:
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Anmerkung:
1. Preliminary Survey -- 2. Particle Beams: Sources, Optics, and Interactions -- 3. Plasmas: Physics and Chemistry -- 4. Layering Technologies -- 5. Pattern Generation -- 6. Microcharacterization -- 7. Limits to Nanofabrication -- Appendixes -- Author Index.
In:
Springer Nature eBook
Weitere Ausg.:
Printed edition: ISBN 9781441932211
Weitere Ausg.:
Printed edition: ISBN 9780306441462
Weitere Ausg.:
Printed edition: ISBN 9781475767766
Sprache:
Englisch
DOI:
10.1007/978-1-4757-6775-9
URL:
https://doi.org/10.1007/978-1-4757-6775-9
