UID:
almahu_9949385866202882
Format:
1 online resource (239 p.)
ISBN:
9781000246407
,
100024640X
,
9781003119937
,
100311993X
,
9781000246469
,
1000246469
,
9781000246438
,
1000246434
Content:
In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of using gases as a fabrication tool. Unlike other books available on the subject,this volumeassumes only entry-level mathematics, physics, and chemistry of undergraduates or high-school students in science and engineering courses.Necessary theories are plainly explained to help the reader learn about this new attractive field and enable further reading of specialized books. The book is an attractive guide for students, young engineers, and anyonegetting involved in micro- and nanofabrication from various fields including physics, electronics, chemistry, and materials sciences.
Note:
Description based upon print version of record.
Additional Edition:
Print version: Kondoh, Eiichi Micro- and Nanofabrication for Beginners Milton : Jenny Stanford Publishing,c2021 ISBN 9789814877091
Language:
English
Keywords:
Electronic books.
DOI:
10.1201/9781003119937
URL:
https://www.taylorfrancis.com/books/9781003119937
