Kooperativer Bibliotheksverbund

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Format: 1 online resource (176 p.)

ISBN: 3-86219-113-3

Note: Summary in German. , Thesis (doctoral)--University of Kassel, 2010. , ""Front cover ""; ""Title page ""; ""Imprint ""; ""Acknowledgements""; ""Abstract""; ""Zusammenfassung""; ""Contents""; ""1. Introduction and Motivation""; ""2. Foundations of Nanoimprint Technology: Stateof the Art""; ""2.1. Introduction""; ""2.2. Overview of Different Nanoimprint Methods""; ""2.2.1. Thermal Nanoimprint""; ""2.2.2. UV Nanoimprint""; ""2.2.3. Soft Nanoimprint""; ""2.2.4. Combination and Variation Methods""; ""2.2.5. Potential Industrial Techniques""; ""2.3. Nanoimprint Devices and Tools""; ""2.3.1. Nanoimprint Templates""; ""2.3.2. Nanoimprint Resists"" , ""2.3.3. Nanoimprint Equipments""""2.4. Applications of Nanoimprint""; ""2.4.1. Lithography""; ""2.4.2. Direct Patterning""; ""2.4.3. Application of 3D Nanoimprint""; ""3. Foundations of Fabrication Technologies Relevant for 3D Nanoimprint at INA""; ""3.1. Template fabrication Technology and Relevant Tools""; ""3.1.1. Photolithography""; ""3.1.2. Dry Etching""; ""3.1.3. White Light Interferometry""; ""3.2. Nanoimprint Technology and Relevant Tools""; ""3.2.1. UV Nanoimprint""; ""3.2.2. Substrate Conformal Imprint Lithography""; ""4. Technology Development of 3D Nanoimprint Templates"" , ""4.1. Methodology of Template fabrication""""4.1.1. General fabrication method of 3D templates""; ""4.1.2. Digital Etching""; ""4.2. Development of High Vertical Resolution 3D Nanoimprint Templates""; ""4.2.1. Possible Solutions for Fabricating 3D Templates""; ""4.2.2. Development and Improvement of Template fabrication Process""; ""4.2.3. Characterization of Etching Process""; ""4.2.4. Experimental Results and Discussion""; ""4.3. Development of 3D Transparent Templates for UV-NIL""; ""4.3.1. Technology Development""; ""4.3.2. Characterization of Etching Process"" , ""5.2.1. Introduction and Design""""5.2.2. Fabrication Process""; ""5.2.3. Filter Cavities Structuring using 3D Nanoimprint""; ""5.2.4. Characterization of Static Sensor Arrays""; ""5.2.5. Summary""; ""5.3. Tunable Optical Sensor Arrays""; ""5.3.1. Introduction and Design""; ""5.3.2. Fabrication Process""; ""5.3.3. Sacrificial Layers Structuring using 3D Nanoimprint""; ""6. Conclusion and Outlook""; ""Appendix""; ""A1 MATLAB® Codes""; ""A2 Mask Design""; ""A3 Process Flow""; ""List of Abbreviations""; ""References""; ""Back cover "" , English

Additional Edition: ISBN 3-86219-112-5

Language: English