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Book

Saile, Volker

Weinheim : Wiley-VCH-Verl.

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Details

UID:

b3kat_BV023805481

Format: X, 479 S. , Ill., graph. Darst. , 25 cm

ISBN: 9783527316984 , 3527316981

Series Statement: Advanced micro & nanosystems 7

Language: English

Subjects: Engineering

RVK:

ZN 3750

Keywords: LIGA-Verfahren

URL: Inhaltstext

URL: Inhaltsverzeichnis

Author information: Saile, Volker

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