Format:
1 Online-Ressource
ISBN:
140204934X
,
9781402049354
,
9781402049347
Series Statement:
Solid mechanics and its applications 141
Language:
English
Subjects:
Engineering
Keywords:
Mikroelektronik
;
Mechanische Eigenschaft
;
Mikrosystemtechnik
DOI:
10.1007/1-4020-4935-8