Format:
1 Online-Ressource
,
v.: digital
Edition:
Online_Ausgabe Boston, MA Springer Science+Business Media, Inc 2005 Springer ebook collection / Chemistry and Materials Science 2005-2008 Sonstige Standardnummer des Gesamttitels: 041171-1
ISBN:
9780387233109
,
9780387233192
Series Statement:
Electronic Materials: Science and Technology 9
Additional Edition:
Reproduktion von Electroceramic-Based MEMS 2005
Language:
English
Subjects:
Engineering
Keywords:
MEMS
URL:
Volltext
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