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Shape and Functional Elements of the Bulk Silicon Microtechnique : A Manual of Wet-Etched Silicon Structures (2005)

Frühauf, Joachim [Sonstige]

Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg

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UID:

b3kat_BV036650586

Format: 1 Online-Ressource , v.: digital

Edition: Online_Ausgabe Berlin, Heidelberg Springer-Verlag Berlin Heidelberg 2005 Springer ebook collection / Chemistry and Materials Science 2005-2008 Sonstige Standardnummer des Gesamttitels: 041171-1

ISBN: 9783540221098 , 9783540268765

Additional Edition: Reproduktion von Shape and Functional Elements of the Bulk Silicon Microtechnique 2005

Language: English

Subjects: Engineering

RVK:

ZN 3750

Keywords: Silicium ; Nassätzen ; Mikrosystemtechnik

URL: Volltext

URL: Cover

URL: Einführung/Vorwort

URL: Inhaltsverzeichnis

URL: Volltext (lizenzpflichtig)

URL: Inhaltsverzeichnis

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