Format:
476 S.
,
Ill., graph. Darst.
ISBN:
0803112734
Series Statement:
ASTM special technical publication 990
Note:
Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute
,
Includes bibliographical references and indexes
,
ASTM publication code number (PCN) 04-990000-46"--T.p. verso
Language:
English
Keywords:
Konferenzschrift