Format:
Online-Ressource (368p)
,
digital
Edition:
Springer eBook Collection. Chemistry and Materials Science
ISBN:
9789401142618
Series Statement:
NATO Science Series, Series 3. High Technology 73
Content:
This concise volume contains the key papers presented during the International NATO Advanced Research Workshop on Silicon on Insulator device technologies. The authors have moved beyond reporting the current state of the technology to explore wider issues, from the economic aspects incorporating SOI and related materials into circuits and systems to consideration of low temperature electronics, quantum devices and MEMS. Readership: Postgraduate and professional engineers and researchers in the major silicon manufacturing companies, universities and research institutes
Additional Edition:
ISBN 9780792361176
Additional Edition:
Erscheint auch als Druck-Ausgabe ISBN 9780792361169
Additional Edition:
Erscheint auch als Druck-Ausgabe ISBN 9780792361176
Additional Edition:
Erscheint auch als Druck-Ausgabe ISBN 9789401142625
Language:
English
DOI:
10.1007/978-94-011-4261-8
URL:
Volltext
(lizenzpflichtig)
