Format:
8
ISSN:
2166-2746
In:
Journal of vacuum science and technology / B, New York, NY : Inst., 1983, Bd. 32.2014, 6, S. 06F101, insges. 8 S., 2166-2746
In:
volume:32
In:
year:2014
In:
number:6
In:
extent:8
Language:
English
Author information:
Rangelow, Ivo W.
Author information:
Ahmad, Ahmad 1975-
Author information:
Lenk, Steve 1984-
Author information:
Ivanov, Tzvetan 1973-
Author information:
Kästner, Marcus 1986-
Author information:
Guliyev, Elshad 1968-