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  • 1
    UID:
    gbv_781985161
    Umfang: 7
    ISSN: 0957-0233
    Inhalt: An interferometer-based metrological scanning probe microscope (SPM) is successfully integrated into our nanopositioning and nanomeasuring machine (NPM machine) for high-precision measurements with nanometre uncertainty over a range of 25 mm × 25 mm × 5 mm. Both devices were developed at the Institute of Process Measurement and Sensor Technology of Ilmenau University of Technology, Germany. Outstanding results were achieved for different measurement tasks. With the NPM machine, truly long-range and long-term measurements are possible. Due to the tip wear, an automatic SPM cantilever replacement is preferable. Such a tip replacement is also required for the integration of multifunctional nanoanalytics. For example, for Kelvin probe force microscopy (KPFM), the measurement of topography and surface potential with different SPM tips is necessary. For this purpose, an electromagnetic tip changer was designed. The tip changer comprises three SPM probes. In order to retrieve the previous tip positions, additional fiducial marks were developed. The repeatability of relocation is less than 10 nm. The automatic tip changer and fiducial marks are integrated into a sample holder. The tip changer in combination with fiducial marks allows scanning distances three times longer (with the same type of SPM probes) and multifunctional nanoanalytics (with different SPM probes with special properties). Sample KPFM measurements are demonstrated. The developed tip changer, including special fiducial marks, improves the performance and functionality of the NPM machine crucially.
    In: Measurement science and technology, Bristol : IOP Publ. Ltd., 1990, 25(2014), 4, Seite 044006, 0957-0233
    In: volume:25
    In: year:2014
    In: number:4
    In: pages:044006
    In: extent:7
    Sprache: Englisch
    Mehr zum Autor: Manske, Eberhard 1956-
    Mehr zum Autor: Hoffmann, Martin 1966-
    Bibliothek Standort Signatur Band/Heft/Jahr Verfügbarkeit
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