UID:
almahu_9949198638802882
Format:
VIII, 142 p.
,
online resource.
Edition:
1st ed. 2002.
ISBN:
9783662050606
Series Statement:
Microtechnology and MEMS,
Content:
This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.
Note:
1. Introduction -- 2. Design Considerations -- 3. Cantilever Beam Resonators -- 4. Resonant Gas Sensor -- 5. Force Sensors for Parallel Scanning Atomic Force Microscopy -- 6. Conclusions and Outlook -- Appendices -- A.1 Process Sequence Resonant Gas Sensor -- A.2 Process Sequence Resonant Gas Sensor (Maskless) -- A.3 Process Sequence AFM Sensor Arrays -- A.4 Material Properties of Thin Film Materials -- References.
In:
Springer Nature eBook
Additional Edition:
Printed edition: ISBN 9783642077289
Additional Edition:
Printed edition: ISBN 9783540431435
Additional Edition:
Printed edition: ISBN 9783662050613
Language:
English
DOI:
10.1007/978-3-662-05060-6
URL:
https://doi.org/10.1007/978-3-662-05060-6
