Format:
1 Online-Ressource (XIV, 529 p)
Edition:
Second Completely Revised and Updated Edition
ISBN:
9783540389675
,
9783642083723
Series Statement:
Springer Series in Optical Sciences 45
Note:
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information
Additional Edition:
Erscheint auch als Druck-Ausgabe ISBN 3-540-63976-4
Language:
English
Subjects:
Physics
Keywords:
Rasterelektronenmikroskopie
DOI:
10.1007/978-3-540-38967-5