Format:
XIV, 485 S
,
Ill., graph. Darst
,
25 cm
ISBN:
0471321834
Note:
Includes bibliographical references and index
Language:
English
Subjects:
Engineering
Keywords:
Mikroelektronik
;
Nanotechnologie
;
Konferenzschrift
URL:
http://www.loc.gov/catdir/toc/onix03/99026481.html