ISSN:
0032-4140
Content:
The specialty of the metrological SPM-head is the combined deflection detection system for simultaneous acquisition of bending, torsion and position of the cantilever with one measuring beam. The deflection system comprises a beam deflection and an interferometer in such a way that measurements of the cantilever displacement are traceable to the SI unit metre. Integrated into a NPM machine scans with a Resolution of 0.1 nm over a range of 25 mm × 25 mm are possible.
Note:
Zsfassung in poln. Sprache
In:
Pomiary, automatyka, kontrola, Warszawa : Wyd. Czasopism Techn. NOT, 1955, 60(2014), 2, Seite 69-72, 0032-4140
In:
volume:60
In:
year:2014
In:
number:2
In:
pages:69-72
Language:
English
Author information:
Manske, Eberhard 1956-
Author information:
Jäger, Gerd 1941-
Author information:
Vorbringer-Dorozhovets, Nataliya 1980-