Format:
1 Online-Ressource (vi, 152 pages)
,
illustrations
Edition:
[S.l.] HathiTrust Digital Library Electronic reproduction
Note:
"IEEE Catalog Number 90CH2810-0"--Title page verso
,
"Theme: 'Manufacturing science'
,
Includes bibliographical references
,
Use copy Restrictions unspecified star MiAaHDL
,
Electronic reproduction
,
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Additional Edition:
Print version IEEE/SEMI International Semiconductor Manufacturing Science Symposium (2nd : 1990 : Burlingame, Calif.) IEEE/SEMI International Semiconductor Manufacturing Science Symposium New York, NY, U.S.A : Institute of Electrical and Electronics Engineers ; Piscataway, NJ, USA : Additional copies may be purchased from IEEE Service Center, ©1990
Language:
English
Keywords:
Konferenzschrift
URL:
http://purl.oclc.org/DLF/benchrepro0212