UID:
almafu_9959326931702883
Format:
1 online resource (xxv, 734 pages) :
,
illustrations
ISBN:
9780470180907
,
0470180900
,
9780470180891
,
0470180897
,
1281094161
,
9781281094162
Content:
An authoritative, systematic, and comprehensive description of current CMP technology. Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the f.
Note:
MICROELECTRONIC APPLICATIONS OF CHEMICAL MECHANICAL PLANARIZATION; CONTENTS; Foreword; Contributing Authors; 1 Why CMP?; 2 Current and Future Challenges in CMP Materials; 3 Processing Tools for Manufacturing; 4 Tribometrology of CMP Process; 5 Pads for IC CMP; 6 Modeling; 7 Key Chemical Components in Metal CMP Slurries; 8 Corrosion Inhibitor for Cu CMP Slurry; 9 Tungsten CMP Applications; 10 Electrochemistry in ECMP; 11 Planarization Technologies Involving Electrochemical Reactions; 12 Shallow Trench Isolation Chemical Mechanical Planarization.
,
13 Consumables for Advanced Shallow Trench Isolation (STI)14 Fabrication of Microdevices Using CMP; 15 Three-Dimensional (3D) Integration; 16 Post-CMP Cleaning; 17 Defects Observed on the Wafer After the CMP Process; 18 CMP Slurry Metrology, Distribution, and Filtration; 19 The Facilities Side of CMP; 20 CMP--The Next Fifteen Years; 21 Utilitarian Information for CMP Scientists and Engineers; Index.
Additional Edition:
Print version: Microelectronic applications of chemical mechanical planarization. Hoboken, N.J. : Wiley-Interscience, ©2008 ISBN 9780471719199
Additional Edition:
ISBN 0471719196
Language:
English
Keywords:
Electronic books.
;
Electronic books.
;
Electronic books.
DOI:
10.1002/9780470180907
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9780470180907
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9780470180907
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9780470180907
