Format:
1 Online-Ressource
,
v.: digital
Edition:
Online_Ausgabe Berlin, Heidelberg Springer-Verlag Berlin Heidelberg 2005 Springer ebook collection / Chemistry and Materials Science 2005-2008 Sonstige Standardnummer des Gesamttitels: 041171-1
ISBN:
9783540221876
,
9783540269458
Series Statement:
Microtechnology and MEMS
Additional Edition:
Reproduktion von Force Sensors for Microelectronic Packaging Applications 2005
Language:
English
Subjects:
Engineering
Keywords:
Prozessüberwachung
;
Kraftsensor
;
Drahtbonden
;
Flip-Chip-Technologie
Author information:
Mayer, Michael Andreas 1971-
Author information:
Brand, Oliver 1964-
