Format:
Online-Ressource (IX, 267 p. 232 illus., 162 illus. in color, online resource)
ISBN:
9783642403873
Series Statement:
Nanostructure Science and Technology
Content:
Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques. Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China. Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.
Note:
Includes bibliographical references
,
Super-resolution Laser Direct Writing and Its ApplicationsLaser path-guided wrinkle structures -- Laser Micro/Nanofabrication and Applications Based on Multiphoton Process -- Laser Interference Nano-Fabrication -- Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons -- Mass production of large-format micro/nano-structure based optical devices.
Additional Edition:
ISBN 9783642403866
Additional Edition:
Erscheint auch als Druck-Ausgabe Liu, Qian Novel optical technologies for nanofabrication Berlin : Springer, 2014 ISBN 3642403867
Additional Edition:
ISBN 9783642403866
Language:
English
Keywords:
Nanotechnologie
;
Lasertechnologie
;
Nanolithografie
DOI:
10.1007/978-3-642-40387-3
