Format:
Online-Ressource (1 online resource (572 p.))
,
digital, PDF file(s).
Edition:
Online-Ausg.
ISBN:
9780511565007
Series Statement:
Cambridge Solid State Science Series
Content:
Modern technology depends on materials with precisely controlled properties. Ion beams are a favoured method to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition to integrated circuit technology, ion beams are used to modify the mechanical, tribological and chemical properties of metal, intermetallic and ceramic materials without altering their bulk properties. Ion–solid interactions are the foundation that underlies the broad application of ion beams to the modification of materials. This text is designed to cover the fundamentals and applications of ion–solid interactions and is aimed at graduate students and researchers interested in electronic devices, surface engineering, reactor and nuclear engineering and material science issues associated with metastable phase synthesis.
Note:
Title from publishers bibliographic system (viewed on 18 Feb 2013)
Additional Edition:
ISBN 9780521373760
Additional Edition:
Erscheint auch als Druck-Ausgabe Nastasi, Michael Ion-solid interactions Cambridge [u.a.] : Cambridge Univ. Press, 1996 ISBN 052137376X
Language:
English
Subjects:
Physics
Keywords:
Festkörper
;
Wechselwirkung
;
Ionenstrahl
;
Ionenstrahlbearbeitung
;
Ionenimplantation
DOI:
10.1017/CBO9780511565007
