Format:
XII, 398 S.
,
Ill., graph. Darst.
,
28 cm
ISBN:
0735407126
,
9780735407121
Series Statement:
AIP conference proceedings 1173
Note:
Sponsoring organizations: National Institute of Standards & Technology
Language:
English
Keywords:
Nanoelektronik
;
Metrologie
;
Konferenzschrift
URL:
http://aip.scitation.org/toc/apc/1173/1
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