Format:
Online-Ressource (XXII, 321p. 225 illus, digital)
ISBN:
9783642194894
Series Statement:
RWTHedition 1
Content:
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.
Content:
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book
Note:
Includes bibliographical references and index
,
References;
Additional Edition:
9783642194887
Additional Edition:
Buchausg. u.d.T. Schomburg, Werner Karl, 1955 - Introduction to microsystem design Berlin : Springer, 2011 9783642194887
Additional Edition:
3642194885
Language:
English
Subjects:
Engineering
Keywords:
Mikrosystemtechnik
;
Systementwurf
DOI:
10.1007/978-3-642-19489-4
URL:
Volltext
(lizenzpflichtig)
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